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Multiplexed broadband beam steering system utilizing high speed MEMS mirrors.

Caleb Knoernschild1, Changsoon Kim, Felix P Lu

  • 1Fitzpatrick Institute for Photonics, Electrical and Computer Engineering Department, Duke University, Durham, NC 27708, USA. caleb.k@duke.edu

Optics Express
|April 29, 2009
PubMed
Summary

This study introduces a micro-electromechanical systems (MEMS) beam steering system for high-speed, multi-wavelength laser control. The technology enables rapid reconfiguration of multiple laser beams, ideal for fast laser multiplexing applications.

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Area of Science:

  • Optoelectronics
  • Micro-electromechanical systems (MEMS)
  • Photonics

Background:

  • Traditional beam steering systems face limitations in speed and wavelength flexibility.
  • The demand for rapid manipulation of multiple optical beams across various wavelengths is increasing in scientific and industrial applications.

Purpose of the Study:

  • To develop and demonstrate a high-speed beam steering system utilizing MEMS technology.
  • To achieve simultaneous steering of multiple laser beams over a broad wavelength range.

Main Methods:

  • Implementation of high-speed micromirrors with broadband metallic coatings.
  • Demonstration of independent beam reconfiguration on a 5x5 array.
  • Utilizing optical system simulations to assess scalability.

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Last Updated: Jun 23, 2026

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Published on: September 25, 2020

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Main Results:

  • Successful reconfiguration of two independent laser beams at 780 nm and 635 nm.
  • Achieved a settling time of 4 microseconds for beam steering.
  • Demonstrated simultaneous steering of multiple beams across a wide wavelength range.

Conclusions:

  • The developed MEMS beam steering system offers high speed and broad wavelength flexibility.
  • The system is a versatile tool for applications requiring fast laser multiplexing.
  • Simulations indicate the system's scalability for future advancements.