Charge conduction and breakdown mechanisms in self-assembled nanodielectrics

Sara A DiBenedetto1, Antonio Facchetti, Mark A Ratner

  • 1Department of Chemistry and the Materials Research Center, Northwestern University, Evanston, Illinois 60208-3113, USA.

Summary

Organosilane-based self-assembled nanodielectrics (SANDs) offer promising high-k gate dielectrics. Optimizing layer structure and tunneling barriers is key to controlling leakage current and enhancing transistor performance.