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Updated: Jun 23, 2026

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
10:40

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy

Published on: April 8, 2018

Integrated ferroelectric stacked MIM capacitors with 100 nF/mm(2) and 90 V breakdown as replacement for discretes

Aarnoud Roest1, Rüdiger Mauczok, Klaus Reimann

  • 1NXP Semiconductors, Eindhoven, the Netherlands. aarnoud.roest@nxp.com

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|May 5, 2009
PubMed

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