Vibration characteristics of a cylindrical shell with 25 microm thickness fabricated by the rotating sputtering...

A thin film rotating sputtering system is presented for fabrication of a circular cylindrical shell (CCS). The length, diameter, and thickness of the CCS are 5.0 mm, 1.5 mm, and 25 mum, respectively. To investigate the vibration characteristics, the CCS is fabricated on the outer surface of a piezoelectric ceramic tube (PCT). The vibration of PCT excited by driving voltage signals causes the vibration of the CCS, and the vibration characteristics can be measured using a laser Doppler vibrometer system. Furthermore, a finite element method (FEM) simulation and 2 analytical calculation methods are proposed for comparison with the measurement results. The frequency factor, the key factor that dominates the effective ranges of the 2 analytical methods, is determined as a value of 0.92 through a series of discussions. Combining the results of the 2 analytical calculation methods, good agreement of the analytical, FEM, and measurement results is obtained.