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Phase-step estimation in interferometry via an unscented Kalman filter.

Thomas E Zander1, Venkatesh Madyastha, Abhijit Patil

  • 1Optical + Biomedical Engineering Laboratory, School of Electrical, Electronic and Computer Engineering, University of Western Australia, Crawley WA 6009, Australia.

Optics Letters
|May 5, 2009
PubMed
Summary

This study introduces an unscented Kalman filter for precise phase step identification in phase shifting interferometry, even with Gaussian noise. The method calibrates piezoelectric transducers without prior device calibration, enabling accurate phase estimation.

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Area of Science:

  • Optical Metrology
  • Signal Processing
  • Control Systems

Background:

  • Phase shifting interferometry (PSI) is a key technique for precise optical surface measurement.
  • Accurate determination of phase steps is crucial for reliable PSI measurements.
  • Piezoelectric transducers are commonly used for phase shifting but require calibration.

Purpose of the Study:

  • To develop a novel algorithm for identifying phase steps in PSI without prior calibration.
  • To address the challenge of Gaussian noise in phase step determination.
  • To enable accurate interference phase estimation using the identified phase steps.

Main Methods:

  • An unscented Kalman filter (UKF) algorithm was developed.
  • The UKF was applied to identify phase steps imparted to a piezoelectric transducer.
  • Simulated data with Gaussian noise and experimental holographic interferometry data were used for validation.

Main Results:

  • The proposed UKF successfully identified phase step values between -pi and pi radians.
  • The algorithm demonstrated robustness in the presence of Gaussian noise.
  • Experimental validation confirmed the effectiveness of the UKF approach in a holographic interferometry setup.

Conclusions:

  • The unscented Kalman filter provides an effective, calibration-free method for phase step identification in PSI.
  • This approach enhances the accuracy and reliability of interference phase estimation.
  • The method is suitable for optical metrology applications dealing with noisy data.