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Updated: Jun 23, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Self-aligned growth of single-walled carbon nanotubes using optical near-field effects
W Xiong1, Y S Zhou, M Mahjouri-Samani
1Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0511, USA.
Abstract:
Self-aligned growth of ultra-short single-walled carbon nanotubes (SWNTs) was realized by utilizing optical near-field effects in a laser-assisted chemical vapor deposition (LCVD) process. By introducing the optical near-field effects, bridge structures containing single suspended SWNT channels were successfully fabricated through the LCVD process at a relatively low substrate temperature. Raman spectroscopy and I-V analyses have been carried out to characterize the SWNT-bridge structures. Numerical simulations using a high-frequency structure simulator revealed that significant enhancement of local heating occurs at metallic electrode tips under laser irradiation; it is about one order of magnitude higher than that in the rest of the electrodes. This technique suggests a novel approach to in situ low-temperature fabrication of SWNT-based devices in a precisely controlled manner, based on the nanoscale heating enhancement induced by the optical near-field effects.

