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Updated: Jun 23, 2026

Experimental and Data Analysis Workflow for Soft Matter Nanoindentation
Published on: January 18, 2022
A new method for determining the strain energy release rate of an interface via force-depth data of nanoindentation
Pal Jen Wei1, Wen Long Liang, Chi Fong Ai
1Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan.
Abstract:
Indentation forces, including constant rate and oscillating mode, were applied to SiO(2)/Si and diamond-like carbon (DLC)/Si specimens. A two-stage behavior was exhibited in the force-depth results after delamination occurred. When the depth was smaller than the threshold value, a linear load-depth relationship was exhibited because the debonded film was suspended over the substrate. Membrane theory was applied to analyze the deflection of the suspended film, and thus the in-plane stress exhibited in the debonded film was evaluated. Through the proposed method, the strain energy release rate of the interface can be directly evaluated by analyzing the force-depth data of the indentation tests.
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