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Related Experiment Video

Updated: Jun 23, 2026

Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores
09:43

Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores

Published on: October 31, 2013

Shrinking solid-state nanopores using electron-beam-induced deposition.

Ronald Kox1, Chang Chen, Guido Maes

  • 1IMEC vzw., Kapeldreef 75, B-3001 Leuven, Belgium. ronald.kox@imec.be

Nanotechnology
|May 8, 2009
PubMed
Summary
This summary is machine-generated.

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Researchers developed a new method to shrink solid-state nanopores to a few nanometres using electron-beam-induced deposition (EBID) in a scanning electron microscope (SEM). This technique offers a simpler way to create nanopores for molecule detection and DNA sequencing.

Area of Science:

  • Materials Science
  • Nanotechnology
  • Surface Science

Background:

  • Solid-state nanopores are crucial for molecular detection and DNA sequencing.
  • Fabricating nanoscale pores typically requires high-energy tools like transmission electron microscopes (TEM) or focused ion beams (FIB).
  • Existing nanopore fabrication methods are often complex and resource-intensive.

Purpose of the Study:

  • To present a novel, accessible method for reducing nanopore size.
  • To demonstrate the use of electron-beam-induced deposition (EBID) for nanopore miniaturization.
  • To investigate the parameters and mechanism controlling the shrinking process.

Main Methods:

  • Utilizing electron-beam-induced deposition (EBID) of carbon within a scanning electron microscope (SEM).

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A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
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Related Experiment Videos

Last Updated: Jun 23, 2026

Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores
09:43

Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores

Published on: October 31, 2013

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
07:47

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography

Published on: February 12, 2017

A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
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A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics

Published on: August 28, 2018

  • Applying EBID to shrink pre-fabricated nanopores in silicon membranes.
  • Anisotropic wet etching was used to create initial nanopores.

    • Main Results:

    • Successfully reduced the size of existing nanopores down to a few nanometres.
    • Demonstrated control over the shrinking rate through EBID parameters.
    • Gained insight into the mechanism of EBID-driven nanopore size reduction.

    Conclusions:

    • EBID in SEM provides a viable and simpler alternative for fabricating ultra-small solid-state nanopores.
    • This method enhances the potential for widespread application of nanopore technology.
    • Further research can optimize EBID parameters for precise nanopore engineering.