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Updated: Jun 23, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

A MEMS-based high frequency x-ray chopper.

A Siria¹, O Dhez, W Schwartz

¹Institut Néel, CNRS-Université Joseph Fourier Grenoble, Grenoble Cedex 9, France.

|May 8, 2009

Summary

This summary is machine-generated.

High-frequency X-ray choppers were developed using silicon microlevers oscillating at 13 kHz. Micro-and nanoelectromechanical systems (MEMS/NEMS) promise future speeds exceeding hundreds of megahertz for advanced experiments.

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Area of Science:

Physics
Materials Science
Engineering

Background:

Time-resolved X-ray experiments necessitate high-frequency intensity modulation.
Current rotating choppers achieve kHz frequencies, limiting temporal resolution.

Purpose of the Study:

To demonstrate a novel high-frequency X-ray chopper using microelectromechanical systems (MEMS).
To explore the potential of MEMS and NEMS for ultra-high frequency X-ray modulation.

Main Methods:

Utilized a silicon microlever oscillating at 13 kHz with nanometric amplitude.
Proposed the use of micro- and nanoelectromechanical systems (MEMS and NEMS) for chopper development.

Main Results:

Successfully demonstrated a 13 kHz silicon microlever as a functional high-frequency X-ray chopper.
Projected that MEMS/NEMS can achieve frequencies exceeding hundreds of megahertz.

Conclusions:

MEMS/NEMS-based choppers offer a pathway to significantly enhance temporal resolution in X-ray science.
This technology can unlock new possibilities for time-resolved studies in chemistry, biology, and physics.