1.3 microm-wavelength phase-locked VCSEL arrays incorporating patterned tunnel junction

We report the fabrication and the performance of phase-locked VCSEL arrays emitting near 1310 nm wavelength. The arrays were fabricated using double wafer fusion by patterning a tunnel junction layer, which serves to define the individual single mode array elements. Phase-locking in both one-dimensional and two-dimensional array configurations was confirmed by means of far field and spectral measurements as well as theoretical modeling. CW output powers of more than 12 mW were achieved.