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Updated: Jun 23, 2026
Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
An innovative and viable route for the realization of ultra-thin supercapacitors electrodes assembled with carbon
Z D Kovalyuk1, F V Motsnyi, O S Zinets
1Chernivtsi Department of Institute for Problem of Materials Science, National Academy of Sciences of Ukraine, 5, I. Vilde Street, 58001 Chernivtsi, Ukraine.
Abstract:
Electrochemical Double Layer Capacitors (EDLC), also known as supercapacitors, have been fabricated using Single Walled Carbon Nanotubes (SWCNTs) as active material for electrode assembling. In particular a new way of fabrication of ultra-thin electrodes (< or = 25 microm) directly formed on the separator has been proposed, and a prototype of EDLC has been realized and tested. For such devices the specific capacitance is in the range 40-45 F/g and the internal resistances in the range 6-8 omega x cm2, at current density of 2 mA x cm-2.
