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Updated: Jun 23, 2026
The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
The anodization voltage influence on the properties of TiO2 nanotubes grown by electrochemical oxidation
Yahya Alivov1, Mahesh Pandikunta, Sergey Nikishin
1Nano Tech Center and Department of Electrical and Computer Engineering, Texas Tech University, PO Box 43102, Lubbock, TX 79409-3102, USA. Yahya.Alivov@ttu.edu
Abstract:
A systematic study of titanium dioxide (TiO2) nanotubes (NTs) grown by electrochemical anodization in NH4F + glycerol electrolyte has been carried out in a broad range of anodization voltage of 5-350 V and acid concentration of 0.1-0.7 wt%. It is found that NTs can be grown in the voltage range from 10 to 240 V. The maximum NH4F acid concentration at which NTs can be formed decreases with the anodization voltage (V(a)). The maximum NH4F acid concentration is 0.7% for V(a)<60 V, and it decreases to 0.1% at V(a) = 240 V. Glancing angle x-ray diffractometer (GAXRD) measurements show that as-grown amorphous TiO2 transforms to the anatase phase when annealed at 400 degrees C, and further transforms to the rutile phase at annealing temperatures higher than 500 degrees C. The transition temperature from anatase to rutile phase depends on the anodization conditions. The electrical resistivity of the NT increases by eight orders of magnitude when V(a) increases from 10 to 240 V.
