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Soft magnetic properties of sequential deposited Co40Fe40B20/SiO2 multilayer nanogranular films for high frequency
Shaowei Bie1, Jianjun Jiang, Qiang Ma
1Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan, 430074, P. R. China.
Abstract:
Multilayer nanogranular films with good soft magnetic properties and high resistivity desired for high frequency applications have been developed in our work. They were prepared by many sequential depositions of thin layers of Co40Fe40B20 and SiO2. After vacuum annealing at 250 degrees C under a uniform in-plane magnetic field of 100 kA/m for 2 hrs, the [Co40Fe40B20 (1.2 nm)/SiO2 (0.8 nm)]30 multilayer nanogranular films have the hard axis coercivity of 210 A/m, saturation magnetization of 1.05 T, resistivity of 2.06 x 10(3) microOmega.cm. Moreover, they show an in-plane uniaxial anisotropy of 2.78 kA/m.
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