Related Experiment Video
Updated: Jun 23, 2026

Simultaneous Multi-surface Anodizations and Stair-like Reverse Biases Detachment of Anodic Aluminum Oxides in Sulfuric and Oxalic Acid Electrolyte
Published on: October 5, 2017
Buried selectively-oxidized AlGaAs structures grown on nonplanar substrates
Researchers developed a new buried oxide grating structure using selective oxidation of aluminum gallium arsenide (AlGaAs) on nonplanar substrates. This novel structure enables advanced semiconductor device fabrication, including resonant-cavity-enhanced photodetectors.
Area of Science:
- Materials Science
- Semiconductor Physics
- Optoelectronics
Background:
- Developing novel semiconductor structures is crucial for advancing optoelectronic devices.
- Selective oxidation of Aluminum Gallium Arsenide (AlGaAs) offers a pathway for creating integrated optical components.
- Nonplanar substrate growth allows for precise control over material composition and structure.
Purpose of the Study:
- To demonstrate a novel buried oxide grating structure for the first time.
- To utilize selective oxidation of AlGaAs on nonplanar substrates for device fabrication.
- To fabricate and characterize a resonant-cavity-enhanced photodetector incorporating the novel structure.
Main Methods:
- Low-pressure Metalorganic Chemical Vapor Deposition (MOCVD) on nonplanar substrates.
- Achieving localized aluminum content variation in AlGaAs.
- Selective oxidation of AlGaAs layers to form buried aluminum oxide.
- Fabrication of a resonant-cavity-enhanced photodetector.
Main Results:
- Successfully formed a novel buried oxide grating structure.
- Demonstrated localized aluminum content variation in AlGaAs via MOCVD on nonplanar substrates.
- Created a buried aluminum oxide/semiconductor distributed feedback structure.
- Fabricated and measured the responsivity spectrum of a resonant-cavity-enhanced photodetector.
Conclusions:
- The study successfully demonstrated a novel buried oxide grating structure using selective oxidation of AlGaAs on nonplanar substrates.
- This technique allows for the creation of integrated distributed feedback structures within semiconductor devices.
- The fabricated resonant-cavity-enhanced photodetector showcases the potential of this novel structure for optoelectronic applications.
Related Concept Videos
Oxidations of Aldehydes and Ketones to Carboxylic Acids
Aldehydes readily undergo oxidation in strong oxidizing agents such as potassium permanganate and chromic acid. The oxidation can also be carried out using mild oxidizing agents such as silver oxide. In fact, aldehydes can be easily oxidized...
Microbial Mats
Oxidation of Alkenes: Syn Dihydroxylation with Osmium Tetraoxide
Anoxygenic Photosynthesis
Oxidative Cleavage of Alkenes: Ozonolysis
Ozone is a symmetrical bent molecule stabilized by a resonance structure.
Green Algae

