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Related Experiment Video

Updated: Jun 23, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
10:39

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Published on: October 11, 2016

Blazed grating fabrication through gray-scale Xray lithography.

Pantazis Mouroulis, Frank Hartley, Daniel Wilson

    Optics Express
    |May 23, 2009
    PubMed
    Summary

    Researchers fabricated high-efficiency blazed gratings using gray-scale X-ray lithography. This advanced technique allows for precise grating fabrication on various substrate shapes, minimizing light loss.

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    Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

    Published on: June 23, 2017

    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Nanofabrication

    Background:

    • Diffractive optical elements are crucial for manipulating light.
    • Traditional grating fabrication methods face limitations in efficiency and substrate conformity.
    • X-ray lithography offers high resolution for micro/nanofabrication.

    Purpose of the Study:

    • To develop a novel method for fabricating high-performance blazed gratings.
    • To characterize the properties of gratings produced by gray-scale X-ray lithography.
    • To demonstrate the versatility of the technique for arbitrary substrate shapes.

    Main Methods:

    • Gray-scale X-ray lithography was employed for grating fabrication.
    • Resist characterization was performed to optimize the process.
    • Fabrication was conducted at varying distances from the X-ray mask.

    Main Results:

    • Successfully fabricated blazed gratings with high efficiency.
    • Achieved low parasitic light, indicating high optical quality.
    • Demonstrated high groove quality and uniformity.
    • Showcased the ability to pattern gratings on substrates of arbitrary shapes.

    Conclusions:

    • Gray-scale X-ray lithography is a viable technique for producing high-quality blazed gratings.
    • The method offers flexibility in substrate choice and shape.
    • The fabricated gratings exhibit excellent optical performance characteristics.