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On-wafer crystallization of ultralow-kappa pure silica zeolite films
Yan Liu1, Christopher M Lew, Minwei Sun
1Department of Chemical and Environmental Engineering, University of California, Riverside, CA 92521, USA.
Angewandte Chemie (International Ed. in English)
|May 26, 2009
Abstract:
A higher goal: An on-wafer crystallization process to prepare pure silica zeolite (PSZ) MEL-type films that is superior to the previously used hydrothermal process is reported. These striation-free MEL-type films (right, see picture) outperform the traditional spin-on films (left) in terms of the kappa value, mechanical properties, surface roughness, mesopore size, and size distribution.
