Related Experiment Video
Updated: Jun 22, 2026

Fabrication of Carbon Nanotube High-Frequency Nanoelectronic Biosensor for Sensing in High Ionic Strength Solutions
Published on: July 22, 2013
The fabrication of nanoelectrodes based on a single carbon nanotube
Jun Shen1, Wei Wang, Qing Chen
1Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, People's Republic of China. shenj@pku.edu.cn
Abstract:
Nanoelectrodes are fabricated from individual carbon nanotubes (CNTs) connected to tungsten probes or carbon fibers. The whole electrode was covered by an insulating HfO(2) layer except for a section of conducting CNT at the apex. The fabrication process includes mounting individual CNTs to the conductive support through nanomanipulation, coating the whole probe by a dielectric layer using atomic layer deposition and removing the dielectric layer at the apex through a nanomanipulation process. Differential pulse voltammetry and cyclic voltammetry measurements show the CNT nanoelectrode has similar electrochemical behavior to the widely used carbon fiber probe, but has a much smaller active electrode area and can provide much higher spatial resolution and signal-to-noise ratio.

