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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Soft lithography replication of polymeric microring optical resonators.
Optics Express
|May 28, 2009
Summary
Soft lithography precisely replicates polymeric integrated optical devices. This method ensures minimal changes in shape and optical performance, proving its value for precision fabrication.
Area of Science:
- Materials Science
- Optical Engineering
- Nanotechnology
Background:
- Integrated optical devices are crucial for modern photonics.
- Fabrication of high-precision optical components presents challenges.
- Soft lithography offers a potential solution for replicating complex microstructures.
Purpose of the Study:
- To develop and evaluate a soft lithography method for replicating polymeric integrated optical devices.
- To assess the fidelity of the replication process by comparing master and replica devices.
- To demonstrate the suitability of soft lithography for producing precision optical components.
Main Methods:
- Developed a soft lithography technique using identical materials for master and replica.
- Fabricated master devices using direct electron beam lithography.
- Produced replicas via molding and ultraviolet curing.
Main Results:
- Microring optical resonators were used as sensitive test devices.
- Replicated devices exhibited minimal changes in physical shape compared to master devices.
- Optical performance of the replicas closely matched that of the master devices.
Conclusions:
- The developed soft lithography method is highly effective for replicating precision integrated optical devices.
- The technique ensures high fidelity replication, preserving both physical and optical characteristics.
- Soft lithography presents a viable and advantageous approach for fabricating advanced optical components.

