Related Experiment Video
Updated: Jun 22, 2026

10:28
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Volume holographic imaging for surface metrology at long working distances
Optics Express
|May 28, 2009
Abstract:
We present an imaging scheme that takes advantage of the superior lateral resolution of volume holographic imaging (VHI)[1] and a-priori surface information about the object to build a profilometer that can resolve 50 microm longitudinal features at a working distance of inverted exclamation markO 50 cm with a single VHI camera. We discuss the scheme and present experimental results of surface profiles of MEMS devices.

