Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O2. The high index contrast waveguides (Deltan ~1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of 100 times silica in As2S3 allowed observation of a pi phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.