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Null ellipsometer with phase modulation.

K Postava, A Maziewski, T Yamaguchi

|June 3, 2009

Summary

This summary is machine-generated.

A novel null ellipsometer utilizing a photoelastic modulator (PEM) enhances signal-to-noise ratio and sensitivity. This new design offers high precision and insensitivity to instrument errors, simplifying measurements.

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Area of Science:

Optical instrumentation
Surface science

Background:

Traditional null ellipsometry relies on precise optical alignment.
Photoelastic modulators (PEMs) can improve signal-to-noise and sensitivity in optical measurements.

Purpose of the Study:

To introduce a new null ellipsometer design incorporating a PEM.
To evaluate the performance and advantages of the PEM-based null ellipsometer.

Main Methods:

Utilized a photoelastic modulator (PEM) for phase modulation.
Employed azimuth measurements of the analyzer and polarizer-PEM system.
Identified null positions by detecting the zero crossings of the first and second harmonics of the modulator frequency.

Main Results:

Achieved high signal-to-noise ratio, sensitivity, and linearity near null positions.
Demonstrated insensitivity to ellipsometer misadjustment and component imperfections.
Showed that modulator calibration is not required.
Proposed a fast ellipsometer mode for rapid measurement of small changes in ellipsometric angles.

Conclusions:

The PEM-based null ellipsometer offers a robust and simplified approach to high-precision ellipsometric measurements.
The system's insensitivity to errors and lack of need for calibration make it practical for various applications.
The proposed fast mode enhances its utility for dynamic measurements.