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A variable-transmittance apodizing filter at 157 nm.

Theodore Bloomstein, Dennis Hardy, Mordechai Rothschild

|June 3, 2009

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Researchers developed a novel variable-transmittance apodizing filter at 157 nm. This filter uses oxygen gas between lenses to control light transmission, offering tunable apodization for optical applications.

Area of Science:

Optics and Photonics
Materials Science

Background:

Apodizing filters are crucial for improving image quality by suppressing diffraction.
Traditional apodizing filters often have fixed transmission profiles.
Achieving variable transmittance in filters, especially at shorter wavelengths, presents a significant challenge.

Purpose of the Study:

To design and demonstrate a novel variable-transmittance apodizing filter.
To achieve tunable apodization at the 157 nm wavelength.
To explore a gas-based method for controlling filter transmission.

Main Methods:

Designed a filter utilizing two meniscus lenses with spherical surfaces.
Employed oxygen gas, known for its absorption below 185 nm, within the lens assembly.
Varied the oxygen partial pressure to modulate the filter's transmission profile.

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Main Results:

Successfully designed and demonstrated a variable-transmittance apodizing filter at 157 nm.
Generated a Gaussian transmission function by controlling oxygen gas flow.
Showcased the ability to tune the degree of apodization by adjusting oxygen partial pressure.

Conclusions:

A novel and controllable method for creating apodizing filters has been established.
The gas-based approach offers a flexible alternative to fixed-transmittance filters.
This technology has potential applications in optical systems requiring dynamic control over light transmission.