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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
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Angle-resolved ellipsometry of scattering patterns from arbitrary surfaces and bulks.

Olivier Gilbert, Carole Deumié, Claude Amra

    Optics Express
    |June 5, 2009
    PubMed
    Summary

    A new Ellipsometry of Angle-Resolved Scattering (E.A.R.S.) technique accurately extracts angular phase data from polarized light scattering measurements. This method distinguishes surface from bulk scattering, regardless of sample type or scattering intensity.

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    Area of Science:

    • Optics and Photonics
    • Materials Science

    Background:

    • Scattering measurements provide insights into material properties.
    • Distinguishing surface from bulk scattering is crucial for accurate analysis.
    • Polarized light offers enhanced sensitivity in optical measurements.

    Purpose of the Study:

    • To develop a novel technique for extracting accurate angular phase data.
    • To enable differentiation between surface and bulk scattering phenomena.
    • To analyze phase data within speckle patterns.

    Main Methods:

    • Utilizing a laboratory-developed technique: Ellipsometry of Angle-Resolved Scattering (E.A.R.S.).
    • Performing angle-resolved scattering measurements with polarized light.
    • Analyzing phase data extracted from scattering measurements and speckle patterns.

    Main Results:

    • Accurate angular phase data successfully extracted from scattering measurements.
    • The E.A.R.S. technique effectively distinguishes surface from bulk scattering.
    • Scattering levels and sample types did not impede the differentiation.

    Conclusions:

    • The E.A.R.S. technique offers a robust method for analyzing scattering phenomena.
    • Accurate phase data extraction is achievable for diverse sample types.
    • This technique advances the study of light-matter interactions in materials.