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Updated: Jun 22, 2026

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Conducting Multiple Imaging Modes with One Fluorescence Microscope
Published on: October 28, 2018
Reflection mode imaging with nanoscale resolution using a compact extreme ultraviolet laser
Optics Express
|June 5, 2009
Abstract:
We report the demonstration of reflection mode imaging of 100 nm-scale features using 46.9 nm light from a compact capillary-discharge laser. Our imaging system employs a Sc/Si multilayer coated Schwarzschild condenser and a freestanding zone plate objective. The reported results advance the development of practical and readily available surface and nanostructure imaging tools based on the use of compact sources of extreme ultraviolet light.
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