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Optical MEMS pressure sensor based on Fabry-Perot interferometry.

Ming Li, Ming Wang, Hongpu Li

    Optics Express
    |June 9, 2009
    PubMed
    Summary
    This summary is machine-generated.

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    This study presents a miniature optical Fabry-Perot interferometric pressure sensor using micro-electro-mechanical system (MEMS) techniques. The sensor demonstrates a linear response and adjustable sensitivity for pressure measurement.

    Area of Science:

    • Optoelectronics
    • Micro-electro-mechanical systems (MEMS)
    • Optical sensing

    Background:

    • Optical interferometric sensors offer high sensitivity for various measurements.
    • Micro-electro-mechanical systems (MEMS) enable miniaturization of sensing devices.
    • Fabry-Perot interferometers are widely used for precise optical measurements.

    Purpose of the Study:

    • To design and demonstrate a simple, miniature optical Fabry-Perot interferometric pressure sensor.
    • To investigate the influence of sensing area size on sensor performance.
    • To achieve high linear response and reasonable sensitivity for pressure sensing.

    Main Methods:

    • Utilized surface and bulk micro-electro-mechanical system (MEMS) techniques for sensor fabrication.
    • Employed a multiple cavities interference model for simulation.

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  • Measured the spectrum shift of the reflected optical signal to gauge pressure.
  • Experimentally validated sensor performance in the 0.2-1.0 MPa range.

    • Main Results:

    • Simulation indicated that sensing area size can alter response range and sensitivity.
    • Experimental results demonstrated a high linear response within the 0.2-1.0 MPa pressure range.
    • Achieved a sensitivity of 10.07 nm/MPa (spectrum shift/pressure).

    Conclusions:

    • A simple and miniature optical Fabry-Perot interferometric pressure sensor was successfully designed and demonstrated.
    • The sensor's performance, including response range and sensitivity, can be tuned by adjusting the sensing area size.
    • The developed MEMS-based sensor shows potential for accurate and reliable pressure monitoring.