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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Non-periodic multilayer analyzers for soft X-rays were designed and fabricated. Mo/Si and Mo/Be multilayers achieved high s-reflectivity, with Mo/Si demonstrating over 45.6% reflectivity and 99.98% polarization.
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