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A method to measure the total scattering cross section and effective beam gas path length in a low-vacuum SEM

J Rattenberger1, J Wagner, H Schröttner

  • 1Institute for Electron Microscopy, Graz University of Technology, Graz, Austria. johannes.rattenberger@felmi-zfe.at

Scanning
|June 9, 2009
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Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
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