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Microlens fabrication using an excimer laser and the diaphragm method
Tao Chen1, Tong Wang, Zhen Wang
1Institute of Laser Engineering, Beijing University of Technology, Beijing, China. chentao@bjut.edu.cn
Optics Express
|June 10, 2009
Summary
A novel excimer laser method fabricates microlenses using a light vignetting effect. This technique offers a fast, simple, and efficient way to create microlens curvature for optical applications.
Area of Science:
- Optics and Photonics
- Materials Science
- Laser Technology
Background:
- Microlens fabrication is crucial for optical systems.
- Existing methods can be complex or time-consuming.
- Novel, efficient fabrication techniques are needed.
Purpose of the Study:
- To introduce a new microlens fabrication method.
- To utilize the light vignetting effect with an excimer laser.
- To demonstrate a simplified and rapid fabrication process.
Main Methods:
- An excimer laser beam was passed through fly's-eye lens arrays.
- A mask and diaphragm created a light vignetting effect.
- Variations in irradiating intensity formed microlens curvature.
Main Results:
- Successful fabrication of microlenses was achieved.
- The method leverages the intensity gradient from vignetting.
- The process resulted in microlens curvature formation.
Conclusions:
- The described diaphragm method is effective for microlens fabrication.
- This technique offers advantages in production time, simplicity, and setup.
- It presents a viable alternative for creating optical microlenses.
