Design optimization of condenser microphone: a design of experiment perspective

A well-designed condenser microphone backplate is very important in the attainment of good frequency response characteristics--high sensitivity and wide bandwidth with flat response--and low mechanical-thermal noise. To study the design optimization of the backplate, a 2(6) factorial design with a single replicate, which consists of six backplate parameters and four responses, has been undertaken on a comprehensive condenser microphone model developed by Zuckerwar. Through the elimination of insignificant parameters via normal probability plots of the effect estimates, the projection of an unreplicated factorial design into a replicated one can be performed to carry out an analysis of variance on the factorial design. The air gap and slot have significant effects on the sensitivity, mechanical-thermal noise, and bandwidth while the slot/hole location interaction has major influence over the latter two responses. An organized and systematic approach of designing the backplate is summarized.