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Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-Pérot Etalon
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High reflectivity air-bridge subwavelength grating reflector and Fabry-Perot cavity in AlGaAs/GaAs
Optics Express
|June 12, 2009
Abstract:
We present a novel air-bridge subwavelength grating reflector with very high reflectivity to be used as a top mirror in a VCSEL structure. We explain the design method, model the structure using both RCWA and FDTD, and predict the characteristics of a Fabry-Perot structure built with this reflector. We describe the fabrication of the suspended grating.

