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Updated: Jun 22, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

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Published on: July 5, 2016

Demonstrating sub-nm closed loop MEMS flattening.

Julia W Evans, Bruce Macintosh, Lisa Poyneer

    Optics Express
    |June 12, 2009
    PubMed
    Summary
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    Ground-based high-contrast imaging requires precise wavefront control. A 1024-Micro-Electrical-Mechanical-Systems (MEMS) deformable mirror achieved these demanding requirements for extrasolar giant planet detection.

    Area of Science:

    • Optical astronomy and instrumentation
    • Exoplanet detection technologies

    Background:

    • Ground-based high-contrast imaging demands wavefront control precision two orders of magnitude higher than standard adaptive optics.
    • Accurate wavefront control is critical for detecting faint objects like extrasolar giant planets near bright stars.

    Purpose of the Study:

    • To demonstrate that advanced Micro-Electrical-Mechanical-Systems (MEMS) deformable mirrors can meet stringent wavefront control requirements for high-contrast imaging.
    • To characterize the performance of a 1024-MEMS deformable mirror for extrasolar planet detection applications.

    Main Methods:

    • Utilized a 1024-MEMS deformable mirror with 340 micrometer actuator spacing and approximately 1 micrometer stroke.
    • Tested the mirror over an active aperture of 27 actuators across.

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  • Characterized individual contributors to wavefront quality, including voltage response and uniformity.

    • Main Results:

    • Achieved residual wavefront error of 0.54 nm root mean square (rms) within controllable spatial frequencies.
    • Demonstrated the mirror's capability to meet the high-precision wavefront control demands for ground-based high-contrast imaging.
    • Identified and quantified factors affecting final wavefront quality.

    Conclusions:

    • The 1024-MEMS deformable mirror is a viable technology for achieving the necessary precision in adaptive optics for extrasolar giant planet detection.
    • This technology advances the capabilities of ground-based telescopes for direct imaging of exoplanets.