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Electronic Distance Measuring Instruments

Electronic Distance Measuring Instruments

Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over short distances...

Design Example: Measuring Distance Between Two Points with Obstructions

Design Example: Measuring Distance Between Two Points with Obstructions

When measuring distances in areas with physical obstructions, such as a lake in a field, surveyors must employ techniques to calculate accurate lengths without direct line measurements. One effective method is the offset technique, which allows for precise distance estimation over inaccessible stretches.In this scenario, a surveyor must measure a side of an area that crosses a lake. Since the measuring tape cannot span the lake, the surveyor begins by establishing a baseline that aligns with...

Distance Measurements by Taping

Distance Measurements by Taping

Tapes are essential in surveying for accurate, durable, and short-distance measurements. Made from lightweight, nylon-coated steel, they offer flexibility and strength for rugged outdoor use. The nylon coating protects against rust and wear, extending the tape's life. Standard lengths, around 30 meters, are marked in meters and millimeters for precision.Surveyors select tapes based on site conditions and accuracy needs. Lightweight, nylon-coated tapes are commonly used for ease of handling and...

Relating Angular And Linear Quantities - II

Relating Angular And Linear Quantities - II

In the case of circular motion, the linear tangential speed of a particle at a radius from the axis of rotation is related to the angular velocity by the relation:

Relating Angular And Linear Quantities - I

Relating Angular And Linear Quantities - I

If the rotational definitions are compared with the definitions of linear kinematic variables from motion along a straight line and motion in two and three dimensions, we can observe a mapping of the linear variables to the rotational ones.
When comparing the linear and rotational variables individually, the linear variable of position has physical units of meters, whereas the angular position variable has dimensionless units of radians, as it is the ratio of two lengths. The linear velocity...

Distance Corrections

Distance Corrections

To achieve precise distance measurements, especially in surveying and construction, certain corrections must be applied to account for potential sources of error like the standardization errors, temperature variations, and slope adjustments.Standardization error emerges when measurement equipment undergoes changes, such as wear, repairs, or weather impacts. To address this, surveyors compare the equipment’s readings to a standard. This process identifies any deviation that might lead to...

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Related Experiment Video

Updated: Jun 22, 2026

Micro/Nano-scale Strain Distribution Measurement from Sampling Moiré Fringes

Micro/Nano-scale Strain Distribution Measurement from Sampling Moiré Fringes

Published on: May 23, 2017

Overlay measurement using angular scatterometer for the capability of integrated metrology.

Chun-Hung Ko, Yi-Sha Ku

|June 12, 2009

Summary

Angular scatterometry offers precise overlay metrology by analyzing light scattered from gratings. This optical technique simultaneously determines overlay, critical dimension, and sidewall angle, showing potential for integrated metrology.

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Last Updated: Jun 22, 2026

Micro/Nano-scale Strain Distribution Measurement from Sampling Moiré Fringes

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Published on: May 23, 2017

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Published on: June 13, 2023

Area of Science:

Optical Metrology
Semiconductor Manufacturing

Background:

Overlay metrology is crucial for semiconductor manufacturing.
Existing methods face challenges in precision and integration.

Purpose of the Study:

To evaluate angular scatterometry as an alternative for precise overlay metrology.
To assess its capability for simultaneous measurement of multiple structure parameters.

Main Methods:

Utilized an angular scatterometer and bright-field microscope for overlay measurements.
Developed a theoretical library using rigorous coupled wave theory.
Matched measured reflected signatures to the library for parameter extraction.

Main Results:

Angular scatterometry demonstrated high precision in overlay measurements.
Achieved low tool-induced shift, indicating measurement stability.
Successfully obtained overlay, critical dimension (CD), and sidewall angle simultaneously.

Conclusions:

Angular scatterometry is a precise and viable technique for overlay metrology.
The method shows significant potential for integrated metrology in semiconductor fabrication.