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Updated: Jun 22, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Compact and low loss silicon-on-insulator rib waveguide 90 degrees bend

Yusheng Qian, Seunghyun Kim, Jiguo Song

    Optics Express
    |June 12, 2009
    PubMed

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