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Updated: Jun 22, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Evaluation of a MEMS deformable mirror for an adaptive optics test bench
Brian P Wallace1, Peter J Hampton, Colin H Bradley
1University of Victoria, Dept. of Mechanical Engineering, Victoria, BC V8W 2Y2, Canada. cbr@me.uvic.ca
Abstract:
An adaptive optics (AO) test bed has been designed and implemented to evaluate the effectiveness of the next generation of AO components and their associated control system. The optical design presented herein incorporates a turbulence generator, tip-tilt mirror, 140-actuator micro-electro-mechanical-system (MEMS) deformable mirror, Shack-Hartmann wave front sensor, and a science camera. This system has been operated in a closed AO loop at a 261 Hz sample rate. This paper focuses on the performance of the MEMS DM. It was examined using an interferometer to determine the influence functions, response time, and the quadratic relationship of displacement of the actuators to an applied voltage.

