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High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay.
Optics Express
|June 17, 2009
Summary
A novel broadband grating coupler for Silicon-On-Insulator waveguides achieves 78% coupling efficiency. This high-efficiency device utilizes a poly-Silicon layer to enhance diffraction properties for optical communication.
Area of Science:
- Photonics and Optical Engineering
- Integrated Optics
- Semiconductor Device Design
Background:
- Silicon-On-Insulator (SOI) waveguides are crucial for integrated photonic circuits.
- Efficient grating couplers are essential for coupling light into and out of SOI waveguides.
- Existing grating coupler designs often face limitations in efficiency and bandwidth.
Purpose of the Study:
- To design a high-efficiency broadband grating coupler for SOI waveguides.
- To investigate the impact of a poly-Silicon layer on grating coupler performance.
- To achieve high coupling efficiency and a wide optical bandwidth.
Main Methods:
- Designed a grating coupler by adding a poly-Silicon layer to the standard SOI waveguide structure.
- Modified the grating structure locally before etching.
- Utilized simulation to calculate coupling efficiencies and optical bandwidth.
Main Results:
- Calculated a maximum coupling efficiency of 78% at a wavelength of 1.55 µm.
- Achieved an optical 3dB bandwidth of approximately 85 nm.
- The proposed device layout is compatible with standard CMOS technology.
Conclusions:
- The addition of a poly-Silicon layer effectively reshapes the grating structure, enhancing diffraction properties.
- The designed grating coupler offers high efficiency and broadband operation for SOI waveguides.
- The CMOS compatibility of the design facilitates integration into existing fabrication processes.
