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Published on: April 26, 2014
A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture
Optics Express
|June 18, 2009
Summary
We developed a compact 50-channel silicon microspectrometer for high-resolution spectral analysis. This device offers precise 0.2 nm channel spacing on an 8mm chip, enabling detailed light analysis.
Area of Science:
- Photonics and Spectrometry
- Integrated Optics
- Materials Science
Background:
- Microspectrometers are crucial for spectral analysis in various fields.
- Existing devices often face limitations in channel density, resolution, or size.
- Silicon-on-insulator (SOI) platforms offer advantages for integrated photonic devices.
Purpose of the Study:
- To demonstrate a high-resolution, high-channel-density arrayed waveguide grating (AWG) microspectrometer.
- To achieve precise spectral measurements on a compact SOI platform.
- To optimize waveguide design for improved spectral resolution and reduced crosstalk.
Main Methods:
- Fabrication of a 50-channel AWG microspectrometer on a silicon-on-insulator (SOI) platform.
- Utilizing high aspect ratio waveguide apertures (0.6 µm x 1.5 µm) for light injection and spectral channel separation.
- Characterization of spectral resolution, channel spacing, crosstalk, and insertion loss.
Main Results:
- A 50-channel microspectrometer with 0.2 nm channel spacing was successfully demonstrated.
- The device achieved a measured crosstalk of <-10 dB.
- The 3 dB channel bandwidth was measured at 0.15 nm, with an insertion loss of -17 dB at 1.545 µm.
Conclusions:
- The developed SOI-based AWG microspectrometer offers high channel density and spectral resolution in a compact form factor.
- The optimized waveguide design effectively minimizes crosstalk and enhances spectral performance.
- This technology holds promise for advanced spectroscopic applications requiring miniaturization and high precision.

