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A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture

P Cheben, J H Schmid, A Delâge

|June 18, 2009

Summary

We developed a compact 50-channel silicon microspectrometer for high-resolution spectral analysis. This device offers precise 0.2 nm channel spacing on an 8mm chip, enabling detailed light analysis.

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Area of Science:

Photonics and Spectrometry
Integrated Optics
Materials Science

Background:

Microspectrometers are crucial for spectral analysis in various fields.
Existing devices often face limitations in channel density, resolution, or size.
Silicon-on-insulator (SOI) platforms offer advantages for integrated photonic devices.

Purpose of the Study:

To demonstrate a high-resolution, high-channel-density arrayed waveguide grating (AWG) microspectrometer.
To achieve precise spectral measurements on a compact SOI platform.
To optimize waveguide design for improved spectral resolution and reduced crosstalk.

Main Methods:

Fabrication of a 50-channel AWG microspectrometer on a silicon-on-insulator (SOI) platform.
Utilizing high aspect ratio waveguide apertures (0.6 µm x 1.5 µm) for light injection and spectral channel separation.
Characterization of spectral resolution, channel spacing, crosstalk, and insertion loss.

Main Results:

A 50-channel microspectrometer with 0.2 nm channel spacing was successfully demonstrated.
The device achieved a measured crosstalk of <-10 dB.
The 3 dB channel bandwidth was measured at 0.15 nm, with an insertion loss of -17 dB at 1.545 µm.

Conclusions:

The developed SOI-based AWG microspectrometer offers high channel density and spectral resolution in a compact form factor.
The optimized waveguide design effectively minimizes crosstalk and enhances spectral performance.
This technology holds promise for advanced spectroscopic applications requiring miniaturization and high precision.