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Related Experiment Video

Updated: Jun 22, 2026

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
12:19

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Published on: April 4, 2017

Fully-integrated CMOS single photon counter.

S Tisa, A Tosi, F Zappa

    Optics Express
    |June 18, 2009
    PubMed
    Summary
    This summary is machine-generated.

    This study presents single-photon avalanche diodes (SPADs) designed using standard CMOS processes, achieving good performance. This integration enables ultra-compact multi-channel single-photon counters.

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    Area of Science:

    • Photonics and Semiconductor Device Engineering
    • Integrated Circuit Design

    Background:

    • Traditional fabrication of Single Photon Avalanche Diodes (SPADs) requires specialized processes beyond standard CMOS.
    • This complexity increases manufacturing costs and limits integration possibilities.

    Purpose of the Study:

    • To design high-performance SPADs utilizing a standard high-voltage CMOS process.
    • To demonstrate monolithic integration of SPADs with essential peripheral circuitry for compact photon counting.

    Main Methods:

    • Design of SPADs within a standard high-voltage CMOS fabrication flow.
    • Monolithic integration of the SPAD detector with an Active Quenching Circuit (iAQC), a counter, and a serial communication interface.

    Main Results:

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    Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
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  • Achieved good performance metrics for SPADs fabricated using a standard CMOS process.
  • Successfully demonstrated monolithic integration of all necessary components for a single-photon counter.

    • Conclusions:

    • Standard CMOS processes can be effectively utilized for fabricating high-performance SPADs.
    • The monolithic integration approach facilitates the development of ultra-compact, multi-channel single-photon counters.