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Spectral and Angle-Resolved Magneto-Optical Characterization of Photonic Nanostructures

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Planar double-grating microspectrometer.

Semen Grabarnik, Reinoud Wolffenbuttel, Arwin Emadi

|June 18, 2009

Summary

This summary is machine-generated.

We developed a miniature spectrometer (0.135 cm³) using two diffraction gratings, eliminating spherical optics. This compact device achieves 3 nm resolution and a 450-750 nm spectral range, ideal for miniaturized spectral analysis.

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Area of Science:

Optics and Photonics
Microfabrication
Spectroscopy

Background:

Traditional spectrometers often require bulky spherical optics and complex assembly.
Miniaturization of optical instruments is crucial for portable and integrated sensing applications.
Diffraction gratings offer a potential solution for compact spectral dispersion and imaging.

Purpose of the Study:

To design and fabricate an ultra-miniature spectrometer with a volume of 0.135 cm³.
To integrate the spectrometer directly onto a Charge-Coupled Device (CCD) sensor.
To achieve high performance in terms of resolution, spectral range, and optical throughput in a compact form factor.

Main Methods:

Fabrication of a spectrometer using two flat diffraction gratings via single-mask 1 µm lithography on a glass wafer.
Assembly of the diced wafer components and direct mounting onto a CCD sensor.
Utilizing the gratings for both spectral dispersion and imaging, obviating the need for spherical optics.

Main Results:

Achieved a spectrometer volume of 0.135 cm³ (dimensions 3x3x11 mm).
Measured spectral resolution of 3 nm over a range of 450 to 750 nm.
Obtained an optical throughput of approximately 9%, consistent with theoretical models.

Conclusions:

Demonstrated a novel, ultra-compact spectrometer design using only flat diffraction gratings.
Successfully integrated the miniature spectrometer onto a CCD sensor for direct spectral analysis.
The results validate the design approach for miniaturized spectrometers with performance suitable for various applications.