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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
1Department of Electrical Engineering, Koc University, Sariyer, Istanbul 34450, Turkey.
This study demonstrates high-resolution imaging and beam steering using three microlens arrays (MLAs). The compact system achieves agile beam steering and high resolution, suitable for endoscopic applications.
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