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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Design of a relay lens with telecentricity in a holographic recording system

Yung-Sung Lan1, Chih-Ming Lin

  • 1Electronics and Optoelectronics Research Laboratories, Industrial Technology Research Institute, Hsinchu 310, Taiwan. YSLan@itri.org.tw

Applied Optics
|June 23, 2009
PubMed

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