Related Experiment Video
Updated: Jun 22, 2026

Obtaining 3D Chemical Maps by Energy Filtered Transmission Electron Microscopy Tomography
Published on: June 9, 2018
Use of an energy filter to improve the spatial resolution of electron backscatter diffraction
Abhishek Bhattacharyya1, John A Eades
1Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA 18015, USA. abhatt72@yahoo.com
Abstract:
The electron backscatter diffraction (EBSD) analytical technique is invaluable for determining the crystallography of bulk alloys, thin films, and nanoparticles. However, our physical understanding of EBSD pattern generation is incomplete, which hinders our ability to push the limits of EBSD analysis. Here, by using an energy filter with better than 10 eV resolution, an improvement in the spatial resolution of the EBSD pattern was experimentally demonstrated. A signal depth of less than 15 nm for an aluminum film was achieved by controlling the cutoff energy of the energy filter. Additionally, a two-fold improvement in the spatial resolution across a grain boundary was observed using the energy filter.
Related Concept Videos
Scanning Electron Microscopy
Fundamental Principles
Accelerated...
Overview of Electron Microscopy
Super-resolution Fluorescence Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
Electron Tomography
Electron tomography can be performed either in TEM or STEM (scanning transmission...
Transmission Electron Microscopy

