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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

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Subsurface damage in precision ground ULE(R) and Zerodur(R) surfaces.

X Tonnellier, P Morantz, P Shore

|June 24, 2009

Summary

Precise grinding reduces defects in ULE and Zerodur optics. This study compares subsurface damage in these materials, identifying process and machine dynamics as key factors influencing grinding quality.

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Area of Science:

Materials Science
Optical Engineering
Manufacturing Processes

Background:

Large optics made of ULE (Ultra Low Expansion) and Zerodur are critical components in various advanced applications.
Achieving high precision and minimizing defects during the manufacturing of these optics is essential for performance.
Current grinding processes can be time-consuming and may introduce undesirable surface and subsurface characteristics.

Purpose of the Study:

To investigate methods for improving the total process cycle time for large ULE and Zerodur optics.
To compare the subsurface damage in ULE and Zerodur glass after grinding using a specific grinding mode.
To characterize the grinding response by analyzing surface roughness, surface profile, and subsurface damage.

Main Methods:

Grinding of ULE and Zerodur optical materials using a selected grinding mode.
Characterization of the grinding response through measurements of surface roughness.
Analysis of surface profile and quantification of subsurface damage depth zones.

Main Results:

The study identified that a precise and rapid grinding process can significantly improve cycle times for ULE and Zerodur optics.
Subsurface damage was observed and quantified in both ULE and Zerodur materials.
The observed subsurface damage was found to be separable into two distinct depth zones: 'process' related and 'machine dynamics' related.

Conclusions:

Optimizing grinding parameters can lead to reduced process cycle times for large optics.
Understanding the distinct zones of subsurface damage is crucial for controlling and minimizing defects.
The findings provide insights into enhancing the manufacturing precision of advanced optical materials like ULE and Zerodur.