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Updated: Jun 22, 2026

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System
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Optimized grating coupler with fully etched slots.

Bernd Schmid1, Alexander Petrov, Manfred Eich

  • 1Technische Universität Hamburg-Harburg, Hamburg, Germany.

Optics Express
|June 25, 2009
PubMed
Summary
This summary is machine-generated.

A new grating coupler optimized for silicon-on-insulator (SOI) waveguides achieves 49% fiber coupling efficiency. This single-step fabrication method avoids reflection and minimizes substrate loss for efficient light transmission.

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Area of Science:

  • Photonics
  • Integrated Optics
  • Nanophotonics

Background:

  • Silicon-on-insulator (SOI) waveguides are crucial for integrated photonic circuits.
  • Efficient fiber coupling is essential for interfacing photonic integrated circuits with external systems.
  • Existing grating couplers often require complex fabrication or suffer from performance limitations.

Purpose of the Study:

  • To optimize a fully etched grating coupler for efficient fiber coupling into SOI slab waveguides.
  • To demonstrate a fabrication process compatible with standard SOI component manufacturing.
  • To analyze and mitigate optical losses, including reflection and substrate radiation.

Main Methods:

  • Design and optimization of a fully etched grating coupler structure.
  • Implementation of an antireflection interface to suppress back-reflection.
  • Optimization of the grating's filling factor and utilization of constructive interference.
  • Theoretical analysis of coupling efficiency and bandwidth.

Main Results:

  • Achieved a theoretical maximal coupling efficiency of 49%.
  • Demonstrated a 3 dB bandwidth of 35 nm.
  • Successfully avoided strong reflection using an antireflection interface.
  • Minimized substrate radiation through constructive interference and optimized filling factor.

Conclusions:

  • The fully etched grating coupler offers a high-efficiency, single-lithography fabrication solution for SOI photonics.
  • The demonstrated design effectively manages optical losses, paving the way for improved device performance.
  • The chirped grating approach was found to be unsuitable for fully etched gratings in this configuration.