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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Computational investigation of nanohole array based SPR sensing using phase shift.
1Department of Electronic Engineering, Center for Advanced Research in Photonics, The Chinese University of Hong Kong, Shatin, NT, Hong Kong SAR, China.
Optics Express
|June 25, 2009
Summary
We developed a new sensor using nanoholes and surface plasmon resonance (SPR) to detect molecular binding. This high-resolution sensor offers improved sensitivity and a wide dynamic range for refractive index monitoring.
Area of Science:
- Nanophotonics and Plasmonics
- Biosensing Technologies
- Surface Science
Background:
- Monitoring refractive index changes is crucial for detecting molecular interactions.
- Traditional Surface Plasmon Resonance (SPR) sensors often require complex optical setups.
- Developing high-resolution, easily implementable sensors is an ongoing challenge in molecular detection.
Purpose of the Study:
- To introduce a novel high spatial resolution sensor for detecting refractive index variations.
- To leverage extraordinary optical transmission (EOT) via SPR for signal transduction.
- To assess the sensor's performance, including sensitivity, dynamic range, and linearity.
Main Methods:
- Fabrication of metallic surfaces with 2D nanoholes.
- Utilizing Surface Plasmon Resonance (SPR) to induce Extraordinary Optical Transmission (EOT).
- Simulating various device design parameters to optimize performance.
- Detecting optical phase changes for signal transduction.
Main Results:
- Achieved a shot-noise limited sensitivity threshold of 4.37 x 10⁻⁹ refractive index units (RIU).
- Demonstrated a wide dynamic range of 0.17 RIU.
- Observed a linear phase change across the entire refractive index detection range.
Conclusions:
- The nanoholes-based SPR sensor offers high spatial resolution and dense integration capabilities.
- The sensor design simplifies practical implementation compared to traditional Kretschmann SPR setups.
- The sensor exhibits favorable high-resolution and wide dynamic range attributes, comparable or superior to existing SPR sensors.

