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Implementation of a Reference Interferometer for Nanodetection

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Efficient waveguide-integrated tunnel junction detectors at 1.6 mum.

Philip C D Hobbs, Robert B Laibowitz, Frank R Libsch

|June 25, 2009

Summary

We developed novel near-infrared detectors using metal-insulator-metal tunnel junctions and silicon nanowire waveguides. These broadband detectors achieve 6% quantum efficiency, overcoming previous limitations in antenna-coupled devices.

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Area of Science:

Photonics
Nanotechnology
Electrical Engineering

Background:

Metal-insulator-metal (MIM) tunnel junctions are explored for optoelectronic applications.
Antenna-coupled devices offer potential for high-speed detection but suffer from low efficiencies.
Silicon nanowire waveguides provide a platform for integrated optical devices.

Purpose of the Study:

To present the first near-infrared detectors based on MIM tunnel junctions integrated with planarized silicon nanowire waveguides.
To demonstrate broadband operation and efficient coupling in antenna-coupled tunnel junction devices.
To address and overcome the limitations of low quantum efficiencies in previous designs.

Main Methods:

Fabrication of Ni-NiO-Ni tunnel junctions and multilayer gold-nickel antennas using electron-beam lithography and directional deposition.
Integration of devices with planarized silicon nanowire waveguides using shallow trench isolation technology.
Design of a plasmonic travelling wave structure for efficient coupling between the antenna and tunnel junction.

Main Results:

Demonstration of broadband operation from 1500-1700 nm.
Achieved overall quantum efficiencies of 6% (0.08 A/W responsivity at 1.605 µm).
Elimination of losses due to poor mode matching and RC rolloff through careful antenna and travelling wave region design.

Conclusions:

The developed detectors represent a significant advancement in antenna-coupled tunnel junction technology.
The achieved efficiency validates the design approach, attributing previous low efficiencies to electromagnetic coupling and antenna material.
This work paves the way for efficient, broadband near-infrared detection integrated on silicon photonics platforms.