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Optical monitoring and real time admittance loci calculation through polarization interferometer
Cheng-Chung Lee1, Kai Wu, Sheng-Hui Chen
1Department of Optics and Photonics/Thin Film Technology Center, National Central University, 320, Taiwan. cclee@dop.ncu.edu.tw
Optics Express
|June 25, 2009
Abstract:
A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

