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One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes
Published on: September 13, 2018
Laminar flow used as "liquid etch mask" in wet chemical etching to generate glass microstructures with an improved
Xuan Mu1, Qionglin Liang, Ping Hu
1School of Pharmacy, East China University of Science and Technology, Shanghai, 200237, P. R. China.
Abstract:
A new method of anisotropic etching an amorphous bulk material is proposed in this paper. Laminar flow is employed in this method to mask the flow of an etchant and is termed as "liquid etch mask". Since this mask has the physical properties of a liquid, it brings several advantages that could not be achieved by any kind of other etch mask in the solid phase. As a consequence, the aspect ratio of the glass channel could be improved to approximately 1 while in an inexpensive and convenient manner.

