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Updated: Jun 21, 2026

Fabrication of Refractive-index-matched Devices for Biomedical Microfluidics
Published on: September 10, 2018
Optical characterization of adaptive fluidic silicone-membrane lenses
Florian Schneider1, Jan Draheim, Robert Kamberger
1Department of Microsystems Engineering - IMTEK, Laboratory for Microactuators, University of Freiburg, Georges-Koehler-Allee 102, 79110 Freiburg, Germany. florian.schneider@imtek.uni-freiburg.de
Abstract:
We present an extended optical characterization of an adaptive microfluidic silicone-membrane lens at a wavelength of 633 nm, respectively 660 nm. Two different membrane variations; one with a homogeneous membrane thickness, and one with a shaped cross section, have been realized. This paper includes the theoretical predictions of the optical performance via FEM simulation and ray tracing, and a subsequent orientation dependent experimental analysis of the lens quality which is measured with an MTF setup and a Mach-Zehnder interferometer. The influence of the fabrication process on the optical performance is also characterized by the membrane deformation in the non-deflected state. The lens with the homogeneous membrane of 5 mm in diameter and an aperture of 2.5 mm indicates an almost orientation independent image quality of 117 linepairs/mm at a contrast of 50%. The shaped membrane lenses show a minimum wave front error of WFE(RMS) = 24 nm, and the lenses with a planar membrane of WFE(RMS) = 31 nm at an aperture of 2.125 mm.
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