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Updated: Jun 21, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

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Dwell time algorithm in ion beam figuring.

Jian Fen Wu1, Zhen Wu Lu, Hong Xin Zhang

  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China. wjf_85@163.com

Applied Optics
|July 14, 2009
PubMed
Summary

This study introduces a revised matrix equation and initial surface error map extension method to achieve high-precision optical surfaces. The novel approach significantly reduces surface errors, enabling superior optical manufacturing accuracy.

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Area of Science:

  • Optical engineering
  • Surface metrology
  • Computational physics

Background:

  • Achieving high-precision optical surfaces is critical for advanced optical systems.
  • Traditional dwell time algorithms face limitations in accuracy and error correction.

Purpose of the Study:

  • To develop an improved method for dwell time deconvolution to enhance optical surface precision.
  • To address challenges related to initial surface errors and scanning path limitations.

Main Methods:

  • Transferred dwell time deconvolution to a matrix equation incorporating damped factors and extra removal amounts.
  • Introduced path and surface error weight factors to account for scanning paths and initial errors.
  • Utilized the Gerchberg bandlimited extrapolation algorithm for initial surface error map extension and the least squares QR (LSQR) algorithm for solving the matrix equation.

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In Situ Characterization of Boehmite Particles in Water Using Liquid SEM
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In Situ Characterization of Boehmite Particles in Water Using Liquid SEM

Published on: September 27, 2017

Related Experiment Videos

Last Updated: Jun 21, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
11:47

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

In Situ Characterization of Boehmite Particles in Water Using Liquid SEM
11:59

In Situ Characterization of Boehmite Particles in Water Using Liquid SEM

Published on: September 27, 2017

Main Results:

  • Successfully reduced surface errors from root mean square (rms) 130.23 nm to 0.1 nm, and from 82.74 nm to 0.08 nm.
  • Demonstrated the effectiveness of the revised matrix equation and error map extension in obtaining high-precision final surfaces within the factual aperture.
  • Validated the method through simulations showing a perfect dwell time solution.

Conclusions:

  • The revised matrix equation and initial surface error map extension provide a robust solution for high-precision optical surface fabrication.
  • The integration of LSQR algorithm ensures accurate dwell time solutions, leading to significant improvements in surface quality.
  • This method offers a pathway to achieving unprecedented precision in optical manufacturing.